infocobuild

EE213 - Soft X-rays and Extreme Ultraviolet Radiation

AST210/ EE213: Soft X-rays and Extreme Ultraviolet Radiation (Fall 2005, UC Berkeley). Instructor: Professor David Attwood. This course covers topics: electromagnetics at short wavelengths, particularly soft X-ray and extreme ultraviolet radiation, X-ray optics, the generation of coherent radiation at EUV and soft X-ray wavelengths, and applications to microscopy and lithography.

Introduction


Lecture 01 - Introduction, Part A
Lecture 02 - Introduction, Part B
Lecture 03 - X-ray Interaction with Matter
Lecture 04 - Radiation by an Accelerated Charge; Scattering
Lecture 05 - X-ray Scattering by a Multi-Electron Atom, Wave Equation and Refractive Index
Lecture 06 - Wave Equation and Refractive Index
Lecture 07 - Brewster's Angle, Multilayer Interface Coating
Lecture 08 - Multilayer Applications
Lecture 09 - Synchrotron Radiation
Lecture 10 - Bending Magnet Radiation, Undulator Radiation
Lecture 11 - Undulator Radiation
Lecture 12 - Spectral Brightness of Undulator Radiation, Undulator Harmonics
Lecture 13 - Plasma Physics
Lecture 14 - Plasma physics (continued)
Lecture 15 - Plasma Waves
Lecture 16 - Blackbody Radiation
Lecture 17 - High Harmonic Generation
Lecture 18 - Lasers
Lecture 19 - EUV and Soft X-ray Lasers
Lecture 20 - Laser Wavelength Scaling
Lecture 21 - Coherence, Spatial and Temporal
Lecture 22 - Coherent Undulator Radiation
Lecture 23 - van Cittert-Zernike Theorem
Lecture 24 - Coherence, Zone Plate Formulas
Lecture 25 - Diffraction by Zone Plates and Pinholes, Resolution
Lecture 26 - DOF, Zone Plates Diffraction, Coherence Issues
Lecture 27 - Applications of Zone Plate Microscopy
Lecture 28 - EUV Lithography

References
Soft X-ray and EUV Radiation
Soft X-rays and Extreme Ultraviolet Radiation. Instructor: Professor David Attwood. Co-listed at UC Berkeley as AST210 and EECS 213. Lecture Material Used in Class.