Chemical Engineering Principles of CVD Processes (Professor R. Nagarajan, IIT Madras) | Chemistry and Chemical Engineering

Chemical Engineering Principles of CVD Processes

Chemical Engineering Principles of CVD Processes. Instructor: Professor R. Nagarajan, Department of Chemical Engineering, IIT Madras. Chemical vapor deposition (CVD) is a process widely used in high-technology industries, as well as in more prosaic applications such as glazing of mirrors. The process involves many core chemical engineering disciplines, such as multicomponent mass transfer, heat transfer, chemical reaction engineering and equilibrium thermodynamics. For students that have received basic as well as advanced training in these aspects, this course is intended to further their learning and to provide a practical framework to apply their learning. (from nptel.ac.in)

Introduction

Lecture 01 - Introduction

Lecture 02 - Chemical Vapor Deposition (CVD) Reactor and Process Design Fundamentals

Lecture 03 - Overview of CVD Process Fundamentals

Lecture 04 - Basics of Chemical Equilibrium Calculations and Flow Dynamics

Lecture 05 - Introduction to CVD Films

Lecture 06 - Film Structure and Properties

Lecture 07 - Pressure Effects on CVD Processes

Lecture 08 - CVD of Metals

Lecture 09 - CVD of Coatings

Lecture 10 - CVD Film Property Measurements

Lecture 11 - CVD Film Property Measurements: Qualitative and Quantitative

Lecture 12 - CVD in Tungsten Filament Lamps

Lecture 13 - CVD in Tungsten Filament Lamps: Design Aspects

Lecture 14 - CVD in Hot Corrosion

Lecture 15 - CVD Transport Phenomena: Conservation Equations

Lecture 16 - CVD Transport Phenomena: Constitutive Laws

Lecture 17 - CVD Transport Phenomena: Mass Transfer Mechanisms

Lecture 18 - CVD Transport Phenomena: Mass Transfer Analogy Condition (MTAC)

Lecture 19 - CVD Transport Phenomena: Effect of Homogeneous Reactions on MTAC

Lecture 20 - CVD Applications: Hot Filament CVD (HFCVD)

Lecture 21 - CVD Applications: Aerosol CVD (ACVD)

Lecture 22 - CVD Applications: CVD of Silicon

Lecture 23 - CVD Applications: CVD in Free-Molecular Flow Regime

Lecture 24 - CVD Applications: CVD of Nano-structured Films

Lecture 25 - CVD Overview

Lecture 26 - Basics of Nano-structured Material Synthesis

Lecture 27 - Basics of Nano-structured Material Synthesis (cont.)

References

Chemical Engineering Principles of CVD Processes
Instructor: Professor R. Nagarajan, Department of Chemical Engineering, IIT Madras. Chemical vapor deposition (CVD) is a process widely used in high-technology industries.