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Chemical Engineering Principles of CVD Processes

Chemical Engineering Principles of CVD Processes. Instructor: Professor R. Nagarajan, Department of Chemical Engineering, IIT Madras. Chemical vapor deposition (CVD) is a process widely used in high-technology industries, as well as in more prosaic applications such as glazing of mirrors. The process involves many core chemical engineering disciplines, such as multicomponent mass transfer, heat transfer, chemical reaction engineering and equilibrium thermodynamics. For students that have received basic as well as advanced training in these aspects, this course is intended to further their learning and to provide a practical framework to apply their learning. (from nptel.ac.in)

Lecture 24 - CVD Applications: CVD of Nano-structured Films


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Lecture 01 - Introduction
Lecture 02 - Chemical Vapor Deposition (CVD) Reactor and Process Design Fundamentals
Lecture 03 - Overview of CVD Process Fundamentals
Lecture 04 - Basics of Chemical Equilibrium Calculations and Flow Dynamics
Lecture 05 - Introduction to CVD Films
Lecture 06 - Film Structure and Properties
Lecture 07 - Pressure Effects on CVD Processes
Lecture 08 - CVD of Metals
Lecture 09 - CVD of Coatings
Lecture 10 - CVD Film Property Measurements
Lecture 11 - CVD Film Property Measurements: Qualitative and Quantitative
Lecture 12 - CVD in Tungsten Filament Lamps
Lecture 13 - CVD in Tungsten Filament Lamps: Design Aspects
Lecture 14 - CVD in Hot Corrosion
Lecture 15 - CVD Transport Phenomena: Conservation Equations
Lecture 16 - CVD Transport Phenomena: Constitutive Laws
Lecture 17 - CVD Transport Phenomena: Mass Transfer Mechanisms
Lecture 18 - CVD Transport Phenomena: Mass Transfer Analogy Condition (MTAC)
Lecture 19 - CVD Transport Phenomena: Effect of Homogeneous Reactions on MTAC
Lecture 20 - CVD Applications: Hot Filament CVD (HFCVD)
Lecture 21 - CVD Applications: Aerosol CVD (ACVD)
Lecture 22 - CVD Applications: CVD of Silicon
Lecture 23 - CVD Applications: CVD in Free-Molecular Flow Regime
Lecture 24 - CVD Applications: CVD of Nano-structured Films
Lecture 25 - CVD Overview
Lecture 26 - Basics of Nano-structured Material Synthesis
Lecture 27 - Basics of Nano-structured Material Synthesis (cont.)