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Fabrication Techniques for Mems-based Sensors: Clinical Perspective

Fabrication Techniques for Mems-based Sensors: Clinical Perspective. Instructor: Prof. Hardik J. Pandya, Department of Electronic Systems Engineering, IISc Bangalore. This course is designed with an aim of educating students in the area of microtechnology and its use to fabricate sensors and systems. The students will have an exposure to sensors and its importance in the real world. The students will also able to understand how to fabricate some of those sensors. Several examples of engineering devices used in clinical research will be also covered. Class 10000 non-conventional clean room and some equipment within it will also be shown. Below are some of the course outcomes. Ability to understand microfabrication process Understand sensors used in electronics and biomedical areas Understand Clean Room (Class 1 to Class 10000) Understand Microengineering Technology Design the process flow for fabricating microheater required in gas sensors. Design the process flow for fabricating forces sensors for biomedical application. Design microheater for gas sensors as per specifications. Design force sensors as per specifications. Understand fabrication of microfluidic platforms, micro-cantilevers, flexible force sensors, interdigitated electrodes, polymer-glass bonding etc. for clinical research. (from nptel.ac.in)

Lecture 55 - Simulation: Electro- Thermo- Mechanical Properties of Micro-heater (cont.)


Go to the Course Home or watch other lectures:

Introduction to Mems-based Sensors
Lecture 01 - Introduction to Microengineering Devices
Lecture 02 - Introduction to Microengineering Devices (cont.)
Lecture 03 - Introduction to Microengineering Devices (cont.)
Fundamentals of Fabrication Techniques
Lecture 04 - Silicon, Silicon Dioxide and Photolithography
Lecture 05 - Silicon, Silicon Dioxide and Photolithography (cont.)
Lecture 06 - Physical Vapour Deposition
Lecture 07 - Physical Vapour Deposition (cont.)
Lecture 08 - Photolithography
Lecture 09 - Mask Aligner
Lecture 10 - Mask Aligner (cont.)
Lecture 11 - Micromachining
Lecture 12 - Micromachining: Fabrication of VOC Sensor
Lecture 13 - Micromachining: Fabrication of VOC Sensor (cont.)
Lecture 14 - Micromachining: Fabrication of VOC Sensor and Cantilever
Lecture 15 - Chemical Vapour Deposition
Application of Fabrication Technology
Lecture 16 - Typical Microfabricated Devices for Biomedical Applications
Lecture 17 - Cancer Diagnostic Tool
Lecture 18 - Process Flow for Fabrication of Micro Heater
Fabrication of Sensors for Cancer Diagnosis
Lecture 19 - Process Flow for Fabrication of Interdigitated Electrodes
Lecture 20 - Process Flow for Fabrication of Interdigitated Electrodes (cont.)
Lecture 21 - Process Flow for Fabrication of ETM Phenotyping
Lecture 22 - Process Flow for Fabrication of Piezo Cantilever
Lecture 23 - Electro-mechanical Phenotyping of Breast Cancer using Flexible MEMS
Lecture 24 - Interdigitated Electrodes in SU-8 Well
Lecture 25 - Microfluidic Chip for Evaluating the Efficacy of Immunotherapy Drugs
Lecture 26 - Microfluidic Chip for Evaluating the Efficacy of Immunotherapy Drugs (cont.)
Fabrication of Microchip for Rapid Drug Screening
Lecture 27 - Microchip for Rapid Drug Screening
Lecture 28 - Microchip for Rapid Drug Screening (cont.)
Lecture 29 - A Microfluidic Chip for Rapid Bacterial Antibiotic Susceptibility Testing
Fabrication of a Smart Catheter
Lecture 30 - Smart Catheter
Lecture 31 - Smart Catheter: Flexible Force Sensor
Lecture 32 - Smart Catheter: Flexible Force Sensor (cont.)
Lecture 33 - Tissue and Cell Culture Techniques
Lab: Introduction to Cleanroom and Cleanroom Equipments
Lecture 34 - Clean Room: Equipments Required
Lecture 35 - GLP: Gowning Procedure for using Lab
Lecture 36 - Introduction to Equipments: Refrigerator
Lecture 37 - Gowning Procedure for using Biological Lab Setup
Lecture 38 - Introduction to Equipments: Desiccator
Lecture 39 - Introduction to Equipments: Impedance Analyzer
Lecture 40 - Introduction to Equipments: DAQ
Lecture 41 - Function generator, Multimeter, Sampling, LabVIEW, NI-CDAQ
Lab: Introduction to Equipments in Cleanroom
Lecture 42 - Introduction to Equipments: Stereo Microscope
Lecture 43 - Introduction to Equipments: Metallurgical Microscope
Lecture 44 - Introduction to Equipments: Inverted Microscope
Lecture 45 - Introduction to Equipments: Fire Alarm
Lecture 46 - Introduction to Equipments: Bio-safety Hood
Lab: Cleanroom Equipments and Demonstration
Lecture 47 - Introduction to Equipments: Peristaltic Pump
Lecture 48 - Introduction to Equipments: Incubator
Lecture 49 - Introduction to Equipments: Oven
Lecture 50 - Introduction to Equipments: Micromanipulator
Lecture 51 - PDMS Moulding
Lecture 52 - 3D Printing
Lecture 53 - Introduction to Fabricated Sensors
Lecture 54 - Simulation: Electro- Thermo- Mechanical Properties of Micro-heater
Lecture 55 - Simulation: Electro- Thermo- Mechanical Properties of Micro-heater (cont.)