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Fundamentals of Micro and Nanofabrication

Fundamentals of Micro and Nanofabrication. Instructors: Prof. Sushobhan Avasti and Prof. Shankar Selvaraja, Centre for Nano Science and Engineering, IISc Bangalore. The course provides an in-depth understanding of top-down device fabrication. Focus is the unit processes typically used in micro and nanofabrication of devices. Both concepts and practical aspects are covered. Topics include crystal growth, doping, chemical vapor deposition, physical vapor deposition, photolithography, wet etching, dry etching, and packaging. The course is accessible to students from diverse backgrounds, such as materials, physics, chemistry, mechanical engineering, and electrical engineering. (from nptel.ac.in)

Lecture 21 - Atomic Layer Deposition


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Substrate and Cleaning
Lecture 01 - Introduction
Lecture 02 - Substrate
Lecture 03 - Substrate (cont.)
Lecture 04 - Introduction to Clean Room
Additive Processing: Defects and Diffusion
Lecture 05 - Contamination and Surface Cleaning
Lecture 06 - Advanced Cleaning Techniques
Lecture 07 - Defects
Lecture 08 - Diffusion
Lecture 09 - Diffusion (Advanced Concepts)
Lecture 10 - Ion Implantation
Additive Processing: Native Films
Lecture 11 - Ion Implantation (cont.)
Lecture 12 - Native Films
Lecture 13 - Native Films (Advanced Concepts)
Lecture 14 - Native Films: Defects at Si/SiO2 Interface
Additive Processing: Chemical Vapor Deposition
Lecture 15 - Methods and Some Definitions
Lecture 16 - Chemical Vapor Deposition: Basics
Lecture 17 - Chemical Vapor Deposition: Precursor Transport
Lecture 18 - Chemical Vapor Deposition: Types of CVD Equipment
Lecture 19 - Chemical Vapor Deposition: Nucleation and Growth
Lecture 20 - Chemical Vapor Deposition: Other Details
Material Deposition: ALD and Physical Vapor Deposition
Lecture 21 - Atomic Layer Deposition
Lecture 22 - Atomic Layer Deposition (cont.)
Lecture 23 - Physical Vapor Deposition: Basics
Lecture 24 - Physical Vapor Deposition: Evaporation
Lecture 25 - Physical Vapor Deposition: Sputtering
Metallization and Optical Lithography
Lecture 26 - Metallization: Contact Resistance
Lecture 27 - Metallization: Electromigration and Epilogue
Lecture 28 - Pattern Transfer Basics
Lecture 29 - Optical Lithography Basics: Resist Process 1
Lecture 30 - Optical Lithography Basics: Resist Process 2
Optical Lithography
Lecture 31 - Optical Lithography: Contact and Proximity Printing
Lecture 32 - Optical Lithography: Stepper and Scanner
Lecture 33 - Projection Lithography: Image Formation Basics
Lecture 34 - Projection Lithography: Image Formation in Photoresist
Lecture 35 - Optical Lithography: Surface Reflection