EE C245/ME C218 - Introduction to MEMS Design (Fall 2011)

UC Berkeley - EE C245/ME C218 - Introduction to MEMS Design (Fall 2011). This consists of 27 video lectures given by Prof. Clark Tu-Cuong Nguyen, providing an introduction to physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro and nanofabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS.


Lecture 01 - Introduction
Lecture 02 - Benefits of Scaling I: Faster Speed
Lecture 03 - Benefits of Scaling II: Lower Power Consumption
Lecture 04 - Benefits of Scaling III: Higher Sensitivity
Lecture 05 - Fabrication Process Modules I
Lecture 06 - Fabrication Process Modules II
Lecture 07 - Surface Micromachining I
Lecture 08 - Surface Micromachining II
Lecture 09 - Surface Micromachining III
Lecture 10 - Bulk Micromachining
Lecture 11 - Mechanics of Materials for MEMS I
Lecture 12 - Mechanics of Materials for MEMS II
Lecture 13 - Mechanics of Materials for MEMS III
Lecture 14 - Energy Methods I
Lecture 15 - Energy Methods II
Lecture 16 - Equivalent Circuits I
Lecture 17 - Equivalent Circuits II
Lecture 18 - Lossless Transducers I
Lecture 19 - Lossless Transducers II
Lecture 20 - Lossless Transducers III
Lecture 21 - Lossless Transducers IV
Lecture 22 - Sensing Circuits I
Lecture 23 - Sensing Circuits II
Lecture 24 - Sensing Circuits III
Lecture 25 - Sensor Resolution I
Lecture 26 - Sensor Resolution II
Lecture 27 - MEMS-Transistor Integration


Web.. EE C245/ME C218, Fall 2011
Instructors: Prof. Clark Tu-Cuong Nguyen. Introduction to MEMS Design. Lecture Notes. Course Information.
inst.eecs.berkeley.edu/~ee245/fa11/