EE C245/ME C218: Introduction to MEMS Design
EE C245/ME C218: Introduction to MEMS Design (UC Berkeley). Physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro and nanofabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS.
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| Video/text | EE C247B/ME C218: Introduction to MEMS Design (Spring 2015) |
| Instructor: Professor Clark Tu-Cuong Nguyen. Introduction to MEMS Design - Physics, fabrication, and design of micro-electromechanical systems (MEMS). |
| Video/text | EE C245/ME C218: Introduction to MEMS Design (Fall 2012) |
| Instructor: Professor Clark Tu-Cuong Nguyen. This course provides an introduction to physics, fabrication, and design of micro-electromechanical systems (MEMS). |
| Video/text | EE C245/ME C218: Introduction to MEMS Design (Fall 2011) |
| Instructor: Professor Clark Tu-Cuong Nguyen. Benefits of Scaling, Fabrication Process Modules, Surface Micromachining, Bulk Micromachining, Mechanics of Materials for MEMS, ... |
| Video/text | EE C245/ME C218: Introduction to MEMS Design (Fall 2010) |
| Instructor: Professor Clark Tu-Cuong Nguyen. Mechanics of Materials for MEMS, Beam Bending, Energy Methods, Resonance Frequency, Equivalent Circuits, Capacitive Transducers, Gyroscopes and Sensing Circuits, ... |