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EE C245/ME C218: Introduction to MEMS Design

EE C245/ME C218: Introduction to MEMS Design (Fall 2012, UC Berkeley). Instructor: Professor Clark Tu-Cuong Nguyen. This course provides an introduction to physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro and nanofabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS.

Introduction


Lecture 01 - Admin & Overview, Introduction to MEMS
Lecture 02 - Benefits of Scaling I: GHz Micromechanical Resonators
Lecture 03
Lecture 04 - Benefits of Scaling II: Chip-Scale Atomic Clocks, Thermal Circuits
Lecture 05 - Benefits of Scaling III: Thermal Circuits (cont.)
Lecture 06 - Benefits of Scaling III (cont.), Fabrication Process Modules I: Oxidation, Film Deposition
Lecture 07 - Fabrication Process Modules II: Film Deposition (cont.), Lithography, Etching
Lecture 08 - Fabrication Process Modules III: Etching (cont.), Semiconductor Doping
Lecture 09 - Surface Micromachining I: Polysilicon Surface Micromachining
Lecture 10
Lecture 11 - Surface Micromachining (cont.), Bulk Micromachining
Lecture 12 - Bulk Micromachining (cont.), Mechanics of Materials for MEMS
Lecture 13 - Mechanics of Materials for MEMS (cont.)
Lecture 14 - Mechanics of Materials for MEMS (cont.), Beam Bending
Lecture 15 - Beam Bending: Stress Gradients in Cantilevers, Folded-Beam Suspension
Lecture 16 - Beam Combos: Folded-Beam Suspension (cont.)
Lecture 17 - Beam Combos: Design Implications of Residual Stress and Stress Gradients
Lecture 18 - Energy Methods, Resonance Frequency
Lecture 19 - Resonance Frequency: Distributed Mass & Stiffness, Folded-Beam Resonator
Lecture 20 - Equivalent Circuits, Capacitive Transducers
Lecture 21 - Capacitive Transducers (cont.)
Lecture 22 - Electrical Stiffness
Lecture 23
Lecture 24 - Comb Drive & Equivalent Circuits II
Lecture 25 - Equivalent Circuits II (cont.), Gyroscopes
Lecture 26 - Gyroscopes and Sensing Circuits
Lecture 27 - Sensing Circuits

References
EE C245/ME C218: Introduction to MEMS Design, Fall 2012
Instructors: Professor Clark Tu-Cuong Nguyen. Lecture Notes. Course Information. Homework. Admin & Overview. Benefits of Scaling. Fabrication Process Modules. ...