infocobuild

MEMS and Microsystems

MEMS and Microsystems. Instructor: Prof. Santiram Kal, Department of Electronics and Electrical Communication Engineering, IIT Kharagpur. This course covers lessons in micro sensors, MEMS materials and its properties, micro electronic and micromachining technology for MEMS, etch stop techniques, microstereolithography, MEMS accelerometers and inertial sensors, interface electronics for MEMS and BIO-MEMS. (from nptel.ac.in)

Introduction


Lecture 01 - Introduction to MEMS and Microsystems
Lecture 02 - Introduction to Microsensors
Lecture 03 - Evaluation of MEMS, Microsensors, Market Survey
Lecture 04 - Applications of MEMS
Lecture 05 - MEMS Materials
Lecture 06 - Properties of MEMS Materials
Lecture 07 - Properties of MEMS Materials (cont.), Microelectronic Technology for MEMS
Lecture 08 - Microelectronic Technology for MEMS: Thin Film Deposition: Evaporation, Oxidation, CVD
Lecture 09 - Microelectronic Technology for MEMS: Lithography, Diffusion, Ion Implantation
Lecture 10 - Micromachining Technology for MEMS
Lecture 11 - Micromachining Process
Lecture 12 - Etch Stop Techniques and Microstructure Fabrication
Lecture 13 - Surface and Quartz Micromachining
Lecture 14 - Fabrication of Micromachined Microstructure Devices
Lecture 15 - Microstereolithography
Lecture 16 - MEMS Microsensors Thermal
Lecture 17 - Micromachined Microsensors Mechanical
Lecture 18 - MEMS Pressure and Flow Sensors
Lecture 19 - Micromachined Flow Sensors
Lecture 20 - MEMS Inertial Sensors
Lecture 21 - Micromachined Micro Accelerometers for MEMS
Lecture 22 - MEMS Accelerometers for Avionics
Lecture 23 - Temperature Drift and Damping Analysis
Lecture 24 - Piezoresistive Accelerometer Technology
Lecture 25 - MEMS Capacitive Accelerometer
Lecture 26 - MEMS Capacitive Accelerometer Process
Lecture 27 - MEMS Gyro Sensors
Lecture 28 - MEMS for Space Applications
Lecture 29 - Polymer MEMS and Carbon Nanotubes
Lecture 30 - Wafer Bonding and Packaging of MEMS
Lecture 31 - Interface Electronics for MEMS
Lecture 32 - MEMS for Biomedical Applications

References
MEMS and Microsystems
Instructor: Prof. Santiram Kal, Department of Electronics and Electrical Communication Engineering, IIT Kharagpur. This course covers lessons in micro sensors, MEMS materials and its properties, ...