MEMS and Microsystems
MEMS and Microsystems. Instructor: Prof. Santiram Kal, Department of Electronics and Electrical Communication Engineering, IIT Kharagpur. This course covers lessons in micro sensors, MEMS materials and its properties, micro electronic and micromachining technology for MEMS, etch stop techniques, microstereolithography, MEMS accelerometers and inertial sensors, interface electronics for MEMS and BIO-MEMS. (from nptel.ac.in)
Lecture 14 - Fabrication of Micromachined Microstructure Devices |
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