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EE C245/ME C218: Introduction to MEMS Design

EE C245/ME C218: Introduction to MEMS Design (Fall 2010, UC Berkeley). Instructor: Professor Clark Tu-Cuong Nguyen. This course provides an introduction to physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro and nanofabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS.

Lecture 02 - Benefits of Scaling I: GHz Micromechanical Resonators


Go to the Course Home or watch other lectures:

Lecture 01 - Admin & Overview, MEMS Roadmaps
Lecture 02 - Benefits of Scaling I: GHz Micromechanical Resonators
Lecture 03 - Benefits of Scaling II: Chip-Scale Atomic Clocks, Thermal Circuits
Lecture 04 - Benefits of Scaling III: Thermal Circuits (cont.)
Lecture 05 - Benefits of Scaling III (cont.), Fabrication Process Modules I: Oxidation, Film Deposition
Lecture 06 - Fabrication Process Modules II: Thin Film Deposition (cont.), Lithography
Lecture 07 - Fabrication Process Modules III: Lithography (cont.), Etching
Lecture 08 - Semiconductor Doping, Surface Micromachining
Lecture 09 - Surface Micromachining (cont.)
Lecture 10 - Surface Micromachining (cont.)
Lecture 11 - Surface Micromachining (cont.), Bulk Micromachining
Lecture 12 - Bulk Micromachining (cont.), Mechanics of Materials for MEMS
Lecture 13 - Mechanics of Materials for MEMS (cont.)
Lecture 14 - Mechanics of Materials for MEMS (cont.), Beam Bending
Lecture 15 - Beam Bending (cont.), Stress Gradients in Cantilevers
Lecture 16 - Beam Combos: Folded-Flexure Suspensions (cont.)
Lecture 17 - Beam Combos (cont.), Energy Methods
Lecture 18 - Energy Methods (cont.)
Lecture 19 - Resonance Frequency
Lecture 20 - Equivalent Circuits, Capacitive Transducers
Lecture 21 - Capacitive Transducers (cont.)
Lecture 22 - Capacitive Transducers (cont.)
Lecture 23 - Capacitive Transducers (cont.), Equivalent Circuits
Lecture 24 - Equivalent Circuits (cont.)
Lecture 25 - Equivalent Circuits (cont.), Gyroscopes and Sensing Circuits
Lecture 26 - Sensing Circuits