EE C247B/ME C218: Introduction to MEMS Design
EE C247B/ME C218: Introduction to MEMS Design (Spring 2015, UC Berkeley). Instructor: Professor Clark Tu-cuong Nguyen. Introduction to MEMS Design - Physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro and nanofabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS. Design project is required. This course is the same as Mechanical Engineering C218.
| Lecture 08 - Surface Micromachining (cont.), Bulk Micromachining |
| Time | Lecture Chapters |
| [00:00:00] | 1. Residual Stress |
| [00:10:17] | 2. Nickel Surface Micromachining Process Flow |
| [00:21:30] | 3. 3D "Pop-up" MEMS |
| [00:25:12] | 4. "Foundry" MEMS: Multi-user MEMS Process (MUMPS) |
| [00:43:10] | 5. The Sandia SUMMIT Process |
| [00:54:55] | 6. Bulk Micromachining |
| [00:58:50] | 7. Bulk Micromachining: Anisotropic Etching of Silicon |
| [01:22:20] | 8. Bulk Micromachining: Boron-Doped Etch Stop |
| [01:29:55] | 9. Bulk Micromachining: Electrochemical Etch Stop |
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